Cleanliness Evaluation as per IEST-STD-CC1246D
In this report, a 4-inch silicon wafer witness plate is submitted for IEST-STD-CC1246D cleanliness evaluation. The report available below is an example of what Clemex PSFilter 2 can deliver in accordance to this standard.
The image of the largest particle found on the wafer is displayed the report.
PURPOSE
This is a fully automated report generated with Clemex PSFilter 2 in accordance with IEST-STD-CC1246D. The full surface of the wafer is analysed to evaluate the cleanliness level of a white room. Poisson’s method is used to determine 95% confidence interval (Lower Confidence Limit [LCL] to Upper Confidence limit [UCL]) of particle count. Normalized counts for each size interval are compared to permissible values.
Particle size distribution
Normalized count
RESULTS
All particles found are measured and their distribution is reported in this graph. Particle count for each size interval is determined and compared to maximum acceptable counts.